Publication Details

Author:A.Rastegar, G. Durkaya, A. Cepler, S. Novak
Title:Effect of radiation on the defectivity and stability of Ru-capped MoSi multilayerblanks
Category:International Refereed Journal
Index:Science Citation Index (expanded)
Published Place:EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY III
Year:2012
Volume:8322, 832211
Pages:
Place:San Jose, California