Publication Details

Author:G. Durkaya, A. Rastegar, H. Kurtuldu
Title:Effect of radiation exposure on the surface adhesion of Ru-capped MoSi multilayer blanks
Category:International Refereed Journal
Index:Science Citation Index
Published Place:PHOTOMASK TECHNOLOGY 2012
Year:2012
Volume:0277-786X
Pages:
Place:San Jose, California
URLhttp://dx.doi.org/10.1117/12.976060